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1700°C九通道混氣高

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聯系方式:長沙市岳麓區天馬路科教新村5區三棟304(大學城辦事處)查看聯系方式

更新時間:2023-02-28 09:52:14瀏覽次數:194次

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聯系人:長沙市岳麓區天馬路科教新村5區三棟304(大學城辦事處)

產品簡介

產品詳情型號:GSL-1700X-HVC9產品概述:GSL-1700X-HVC9isCEcertified80mmdiameteraluminatubefurnacewithvacuumpumpsystem(upto10-5torr)and9channelprecisiondigitalMassflow-meters

詳細介紹

產品詳情

型號:GSL-1700X-HVC9

產品概述:GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.

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技術參數實驗案例警示/應用提示配件詳情
Furnace Structure

· Double layer steel casing with air cooling. 

· Two cooling fans inside to keep  case temperature < 55oC.

· 內爐膛表面涂有美國進口的高溫氧化鋁涂層可以提高設備的加熱效率,同時也可以延長爐膛的使用壽命

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High purity Alumina refractory chamber

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Vacuum and gas mixing system is located in bottom cart with 4 wheel.

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Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.


Power

 6 Kw


Voltage

AC 208-240V Single Phase, 50/60 Hz


Heating Element

8?pcs1800oC grade MoSi2 heating element


Max. Temperature

1650 oC (< 2hours )(更新時間:19.12.10--JS2)


Continuous Temperature

1600 oC


Max. Heating Rate

≤5  oC /min


Tube Size and Materials

Premier Grade alumina tube made in USA.

(標配尺寸) ( 60mm) O.D.x I.D. (54mm) x 1000mm Length

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(選配尺寸) ( 80mm) O.D.x I.D. (74mm) x  1000mm Length 

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Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).
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Heating Zone

Heating zone length: 457 mm (18")

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Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注:由于測量手段及外部環境的影響,測量結果可能會有偏差,此參數僅供參考不作為該設備的技術指標。您購買產品需要準確的恒溫區數據,請與我公司銷售人員聯系 


Temperature controllers

One precision digital temperature controller programmable with 50 segments.

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PID adjustable with auto tune function to ensure temperature stability within  +/- 1 oC.    

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控溫儀表操作視頻

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Full protection in each controller for over-temperature and broken thermal couple.


Thermal Couple

B type thermal couples built in


Vacuum Flanges

· Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.

· Double high temperature silicone O-ring for using under 300oC.

Porous alumina blocks included for protecting flange from heat radiation.


Vacuum pumps

 Tow stages vacuum pump installed in bottom case:

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OneDouble Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr.  

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One turbo molecular pump with max. vacuum pressure of 2x10-5 torr.

One precision vacuum sensor installed. 

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Stainless steel hose tube is included for connecting to tube furnace.

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Digital vacuum meter / controller installed.


Vacuum Sensor & display

Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

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Vacuum controller and display areinstalled in bottom cart.

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Gas flow meter User Manual?(Click to download)

· 9 precision mass flow meters (CS200) controllers are installed in bottom  cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-99% of full scale) 

· 3 MFC at range 0 - 1000scc

· 3 MFC at range 0 - 200scc

· 3 MFC at range 0 - 10 scc

· one floating meter will be installed for N2 gas only

· one mechanical pressure meters are installed in bottom cart for monitor each gas 's pressure in mixer.

· 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
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Software and interface (optional at extra cost).  Please click uderline for software operation instruction

         blob.png 

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Pipe connection,  valves and gas mixer

· SS 316 1/4" pipe/fitting

· SS 316 vacuum needle valves

· 21 sets of stainless steel vacuum valves are installed outside of  right side panel of cabinet to control, vacuum pump, flowing gases and two inlet gases separately.

Please click here to see sketch of pipe connection.

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Dimension

Furnace: 550 x 380 x 520  Bottom case: 600x600x597


Net Weight

about 100 kg


Shipping weight

200 Lbs 


Shipping package size after crating

Two cases in one plastic pallet: 45x45x35/case


Warranty & certificate

One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)

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blob.png CE Certificate



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